X-ray Analysis

It is using x-ray penetration capability to investigate any internal physical structures defect (non-destructive method). X-ray photography is a shadow method, where the contrast is due to material (element atomic number), thickness or density differences.

The normal X-ray energy range used in electronic industrial is 50 – 160 kV. The soft X-ray energy range is 2 - 10 kV, and useful in other area (especially less harmful to human). Some x-ray system capable to provide geometrically magnification up 5000+, and minimum resolution of 0.1 µm to clearly differentiate small feature.

Example of X-ray used in Board level analysis

Example of X-ray used in IC Device analysis